Active cantilever with integrated actuation and sensing for use in off-resonance tapping AFM

- Franco Soares de Bem, Natã

4-DOF SOI-MEMS ultrasonic energy harvester

- Fowler, Anthony G., Moheimani, S. O. Reza

A 4-DOF MEMS energy harvester using ultrasonic excitation

- Fowler, Anthony G., Moheimani, S. O. Reza

MEMS nanopositioner for on-chip atomic force microscopy: a serial kinematic design

- Maroufi, Mohammad, Fowler, Anthony G., Reza Moheimani, S. O.

MEMS-based nanopositioning for on-chip high-speed scanning probe microscopy

- Maroufi, Mohammad

A comprehensive analysis of MEMS electrothermal displacement sensors

- Bazaei, Ali, Moheimani, S. O. Reza

A feedback controlled MEMS nanopositioner for on-chip high-speed AFM

- Mohammadi, Ali, Fowler, Anthony G., Yong, Yuen K., Moheimani, S. O. Reza

Displacement measurement with a self-sensing MEMS electrostatic drive

- Moore, Steven I., Moheimani, S. O. Reza

High precision MEMS displacement sensors: device techniques and readout circuits

- Mohammadi, Ali

MEMS rotary microgripper with integrated electrothermal force sensor

- Piriyanont, Busara, Moheimani, S. O. Reza

A MEMS electromagnetic energy harvester using ultrasonic excitation

- Fowler, Anthony G., Moheimani, S. O. Reza, Behrens, Sam

Closed-loop control of a novel 2-DOF MEMS nanopositioner with electrothermal actuation

- Fowler, Anthony G., Rakotondrabe, Micky, Moheimani, S. O. Reza

Control of a MEMS nanopositioner for atomic force microscopy

- Yong, Y. K., Fowler, A. G., Mohammadi, A., Moheimani, S. O. R.

MEMS resonator with displacement sensor based on electro-thermal principles

- Moore, Steven, Moheimani, S. O. Reza

A 2-DOF electrostatically actuated MEMS nanopositioner for on-chip AFM

- Fowler, A. G., Laskovski, A. N., Hammond, A. C., Moheimani, S. O. R.

A low-flicker-noise MEMS electrothermal displacement sensing technique

- Mohammadi, A., Yuce, M. R., Moheimani, S. O. R.

A micromachined 2DOF nanopositioner with integrated capacitive displacement sensor

- Ji, Lujun, Zhu, Yong, Moheimani, S. O. Reza, Yuce, Mehmet Rasit

A pendulum-like structure for design of oscillators

- Chenniappan, Venkatesh, Moheimani, Reza, Yuce, Mehmet